Helmich, Lailah; Walter, Dominic C.; Bredemeier, Dennis; Schmidt, Jan
(Weinheim : Wiley-VCH, 2020)
Stacks of hydrogen-lean aluminum oxide, deposited via plasma-assisted atomic-layer-deposition, and hydrogen-rich plasma-enhanced chemical vapor-deposited silicon nitride (SiNx) are applied to boron-doped float-zone silicon ...